기계공학부 구성원들의 많은 관심과 참여 부탁 드립니다.

▣ 제  목: Fabrication of glass-molded micro/nano structures using vitreous carbon mold

▣ 연  사: 김석민 교수

▣ 소  속: 중앙대학교 기계공학부

▣ 일  시: 2022. 5. 20.(Fri) 13:00

▣ 장  소: Online(Zoom)

▣ 초  청: 신동준 교수 

▣ 초  록

The fabrication of micro/nano structured systems has and will have a significant effect not only in the semi-conductor industry, but also in bio-medical, optical, and energy industries. A polymer replication process has been widely applied for the commercialization of micro/nano structured systems due to its cost effectiveness. However, the application of a polymeric micro/nano structure is limited when high thermal stability, high chemical resistance, good optical properties, and low permeability to moisture are required. Glass micro/nano structures are a promising solution in these applications. Among the various micro/nano machining techniques used for fabricating glass micro/nano structures, the glass molding technique, in which the initial glass material is pressed at high temperature against a mold having the negative shape of the micro/nano structure, is considered the most suitable method for the mass production of glass microstructures because of its high repeatability, ability to fabricate large area patterns, low fabrication cost, and wide material selection. One of the key issues in micro/nano glass molding process is the development of suitable fabrication method for micro/nano mold which has sufficient thermal, chemical and mechanical resistance.

In this seminar, a method to fabricate vitreous carbon (VC) mold using carbonization of replicated furan precursor will be introduced for glass molded micro/nano structures. The composition of the initial furan curable polymer and processing parameters were optimized to achieve high surface quality of VC mold, and a method to predict the shape change during the fabrication process was developed. As a practical applications of proposed techniques, some glass micro fluidic chips, glass micro/macro optical components and glass nanophotonic devices were designed fabricated and evaluated.

https://yonsei.zoom.us/j/92176883832?pwd=V0xDQy9VOVgxRXU2cW9sTzJUbkJTQT09